Fabmann can supply sputtering targets for thin film, and they are available monoblock or bonded with planar target dimensions and configurations up to 800mm. We can also provide custom fabrication such as hole drilling, threading, beveling and grooves. Our supper high purity 6N (99.9999%) Copper (Cu) sputtering targets are available for different designs and configurations which are compatible with all standard guns including circular, rectangular, annular, oval, rotatable (rotary), and custom dimensions.
Production Process
Fabmand use advanced production solution including crystallization, solid state and other ultra high purification processes such as sublimation to make high quality custom copper targets, and the strict production process control is vital for ensuring high quality, and it normally have following steps:
√ Producing high-purity copper ingots through electrolytic refining, vacuum induction melting, and vacuum electron beam melting.
√ Second step is to get the copper ingot to go through hot forging, heat treatment, cold forging, and heat treatment in sequence to obtain pre-treated copper blanks.
√ The pre-treated copper blank is then subjected to hot rolling, heat treatment, cold rolling, and heat treatment in sequence to obtain a copper target blank.
√ Remove the skin of copper target blanks.
√ Make custom machining work to achieve the desired final dimensions and surface finish, and it is necessary to spray coolant to prevent copper tube target from deforming due to machining stress.
√ After grinding and polishing, the finished copper target material is obtained.
Test & Quality Control
Dimension Check of Custom Copper Target
Fabmann performs strict quality control processes for all our delivery, and all our copper targets are analyzed by various advanced equipments such as X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). Our inspection also involves a set of tests such metallographic structure check, Oxygen/Hydrogen analysis to verify the purity and composition of the target.
Product Dimension
√ Customized dimension with max length to 3,000mm
√ From 2" to 8'', Thickness: 0.125" & 0.250''
√ 1", thickness 0.125"
√ Vacuum packing
Hot Tags: planar copper target, China planar copper target manufacturers, suppliers, factory, Copper Busbar, Scanning Magnet, Wiggler And Undulator, Kicker Magnet, Custom Copper Bar, Custom Copper Conductor
